Coherent light generators – Particular active media – Plural active media or active media having plural dopants
Patent
1996-06-07
1998-11-17
Healy, Brian
Coherent light generators
Particular active media
Plural active media or active media having plural dopants
372 21, 372 22, 372 23, 372 25, 372 69, 372 70, 372109, 372 26, H01S 314
Patent
active
058387099
ABSTRACT:
An ultraviolet laser source which can stably emits ultraviolet light having a sufficient output and low coherence, as a light source for an exposure unit, for a long period of time, is compact, and allows easy maintenance. The laser source is constituted by 10.times.10 laser elements, i.e., a total of 100 laser elements. Each laser element includes a laser beam emitting section for emitting light having a long wavelength, i.e., visible or infrared light, and a wavelength converting section for converting the emitted laser beam into ultraviolet light. The laser beam emitting section includes a semiconductor laser, and a solid-state laser. The wavelength converting section contains a nonlinear crystal for converting the wavelength of incident light and outputting the resultant light.
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Healy Brian
Nikon Corporation
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