Ultraviolet laser light source pulse energy control system

Details Ultraviolet laser light source pulse energy control system Ultraviolet laser light source pulse energy control system

2007-09-11

2010-11-09

Harvey, Minsun (Department: 2828)

Coherent light generators

Particular active media

Gas

C372S025000, C372S029015, C372S029010, C372S057000

Reexamination Certificate

active

07830942

ABSTRACT:
A method and apparatus is disclosed which may comprise: a gas discharge laser system energy controller which may comprise: a laser system energy controller providing a first laser operating parameter control signal based on an error signal related to a value of the output energy of the laser system compared to a target value for output energy and an energy controller model of the value of the first laser operating parameter necessary to change the value of the laser system output energy to the target value; a first laser system operating parameter control signal modifier providing a modification to the first laser system operating parameter control signal based upon a controller signal modification model of the impact of a second laser system operating parameter on the value of the first laser system operating parameter necessary to change the value of the output energy to the target value.

REFERENCES:
patent: 6005879 (1999-12-01), Sandstrom et al.
patent: 6690704 (2004-02-01), Fallon et al.
patent: 7039086 (2006-05-01), Fallon et al.
patent: 2006/0146900 (2006-07-01), Jacques et al.
patent: 2006/0251135 (2006-11-01), Ershov et al.
patent: 2007/0195836 (2007-08-01), Dunstan et al.

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