Coherent light generators – Particular resonant cavity – Plural cavities
Patent
1998-06-09
2000-07-11
Scott, Jr., Leon
Coherent light generators
Particular resonant cavity
Plural cavities
372 21, 372 5, 372 22, H01S 3082
Patent
active
060883790
ABSTRACT:
An ultraviolet laser apparatus which generates laser light at 193 nm to 213 nm with high temporal and spatial coherence and relatively high power is disclosed. The UV laser apparatus provides a light source for an exposure device for optical lithography and an aberration measurement interferometer that measures lens wave front aberration. The laser apparatus disclosed herein comprises two lasers having laser resonators that are coincident along a portion of their respective optical paths. A nonlinear optical crystal is located along the shared optical path portion for sum frequency generation of the light of the respective lasers.
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Ohtsuki Tomoko
Owa Soichi
Jr. Leon Scott
Nikon Corporation
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