Ultrathin-film gas detector

Details Ultrathin-film gas detector Ultrathin-film gas detector

1989-07-31

1990-09-04

Williams, Hezron E.

Measuring and testing

Gas analysis

By thermal property

422 98, G01N 2712

Patent

active

049533878

ABSTRACT:
A device for detecting a gaseous species including (i) a silicon substrate having two major surfaces and comprising a dielectric window region (ii) a heater situated on the dielectric window region on one major surface; and (iii) a conductivity cell electrode thin metal transducing film assembly situated on the dielectric window region on the other major surface is disclosed. The thin transducing film contacts the conductivity cell electrode.

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