Ultrasonic washing apparatus

Cleaning and liquid contact with solids – Apparatus – Automatic controls

Reexamination Certificate

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Details

C134S113000, C134S184000, C134S902000, C134S05600D

Reexamination Certificate

active

06189547

ABSTRACT:

BACKGROUND OF THE INVENTION
The present invention relates to an ultrasonic washing apparatus having a sound pressure sensor for detecting an ultrasonic wave for washing generated by an ultrasonic vibrator.
In a prior ultrasonic washing apparatus, a housing has a central hollow portion and an inclined hollow portion, A nozzle is formed at the end of the inclined portion, and a step portion is formed in the central hollow portion. An ultrasonic vibrator is mounted on the step portion, A high frequency oscillator is connected to the ultrasonic vibrator through connected lines, and a liquid flowing inlet is connected to the central hollow portion of the housing and to a liquid supply means.
When a liquid as a washing liquid is supplied to the housing by the liquid supply means and the oscillating output from the high frequency oscillator is applied to the ultrasonic vibrator, liquid with ultrasonic waves flows from the nozzle of the housing, and a surface of an object such as a semiconductor placed in the front of the nozzle is washed by the liquid and ultrasonic waves.
In this ultrasonic washing apparatus, since a sound pressure sensor is large, the sound pressure sensor must be placed at the position of the object for detecting the ultrasonic waves in the liquid flowing from the nozzle of the housing, and the voltage detected by. the sound pressure sensor is measured by a voltmeter.
Therefore, the ultrasonic waves in the liquid cannot be detected by the sound pressure sensor when the object is washed.
SUMMARY OF THE INVENTION
It is, therefore, the primary object of the present invention to provide an ultrasonic washing apparatus having a sound pressure sensor for detecting ultrasonic waves when an object is washed.
It is another object of the present invention to provide an ultrasonic washing apparatus in which the sound pressure sensor is installed in a housing having a nozzle.
In order to accomplish the above and other objects, the present invention comprises a housing having a central hollow portion providing a liquid supplying inlet and a sensor chamber and an inclined hollow portion, one end of which is connected to the central hollow portion and the other end of which forms a nozzle, an ultrasonic vibrator fixed on the step portion of the end of the central hollow portion, a sound pressure sensor attached to the sensor chamber, a high frequency oscillator connected to the ultrasonic vibrator, a receiving means connected to the sound pressure sensor, and a voltmeter connected to the receiving means.


REFERENCES:
patent: 4326553 (1982-04-01), Hall
patent: 4403735 (1983-09-01), Weaver
patent: 5100476 (1992-03-01), Mase et al.
patent: 5383483 (1995-01-01), Shibano
patent: 5927306 (1999-07-01), Izumi et al.
patent: 5975098 (1999-11-01), Yoshitani et al.
patent: 6003527 (1999-12-01), Netsu
patent: 6050276 (2000-04-01), Harada
patent: 63-266831 (1988-11-01), None
patent: 2-90532 (1990-03-01), None
patent: 4-213827 (1992-08-01), None
patent: 5-175184 (1993-07-01), None

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