Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Patent
1997-11-18
1999-07-27
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
With means to movably mount or movably support the work or...
134184, 134198, 2391022, B08B 310
Patent
active
059273062
ABSTRACT:
An ultrasonic cleaning nozzle comprises an ultrasonic vibrator, a case body and a nozzle cap. A chemical liquid supplied from a supply port is irradiated with ultrasonic waves by the ultrasonic vibrator, and thereafter sprayed from a spray port. The ultrasonic waves linearly advance in the chemical liquid, strike an inner wall of the nozzle cap, reflect and thereafter spray from the spray port with the chemical liquid. An ultrasonic wave irradiation surface of the ultrasonic vibrator and the inner wall of the nozzle cap are coated with high-purity SiC. The parts of the nozzle which are in contact with the chemical liquid and are struck by the ultrasonic waves have resistance against the ultrasonic waves and are corrosion resistant against the chemical liquid.
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Izumi Akira
Kawakatsu Tetsuo
Dainippon Screen Mfg. Co,. Ltd.
Stinson Frankie L.
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