Ultrasonic transducer, ultrasonic probe and method for...

Details Ultrasonic transducer, ultrasonic probe and method for... Ultrasonic transducer, ultrasonic probe and method for...

2007-01-23

2010-02-23

Leung, Quyen (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S366000, C310S311000, C310S309000, C310S323060

Reexamination Certificate

active

07667374

ABSTRACT:
In an ultrasonic transducer including a gap between an upper electrode and a lower electrode on a silicon substrate, it is made possible to reduce or adjust warpage of an above-gap membrane vibrated by electrostatic actuation due to internal stress. A fourth insulating film and a fifth insulating film of films positioned above the gap which is a cavity required for transmitting and receiving ultrasonic are respectively a silicon oxide film for compression stress and a silicon nitride film for tensile stress. Therefore, compression stress and tensile stress cancel each other, so that warpage of the above-gap membrane is reduced. An amount of warpage can be adjusted by adjusting a film thickness of the fourth insulating film and a film thickness of the fifth insulating film.

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