Ultrasonic transducer fabricated as an integral part of a monoli

Details Ultrasonic transducer fabricated as an integral part of a monoli Ultrasonic transducer fabricated as an integral part of a monoli

1980-09-18

1984-02-14

Wojciechowicz, Edward J.

Electricity: electrical systems and devices

Safety and protection of systems and devices

With specific current responsive fault sensor

357 51, 361283, 338 4, 73718, 73724, H01L 2984, H01L 2966

Patent

active

044320078

ABSTRACT:
An array of electrostatic transducers is fabricated on a monolithic integrated circuit chip having provision for detection, amplification, and signal processing of received echoes. The transducer is multilayered with the form of a parallel plate capacitor, and is made by laterally etching an insulating layer through a small hole in the overlying layer to create a void region, then depositing a sealing layer to seal the etch holes. The upper metallic layers cover the transducer array and other monolithic circuitry and are etched to be interconnections for the various components.

REFERENCES:
patent: 3715638 (1973-02-01), Polye
patent: 3973146 (1976-08-01), Arnold et al.

Affiliated with

Also associated with

Rating

Ultrasonic transducer fabricated as an integral part of a monoli does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ultrasonic transducer fabricated as an integral part of a monoli, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ultrasonic transducer fabricated as an integral part of a monoli will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2377728