Metal working – Electric condenser making – Solid dielectric type
Patent
1978-11-08
1981-04-21
Massie, Jerome W.
Metal working
Electric condenser making
Solid dielectric type
29579, 156653, 156656, 156657, 1566591, 156662, 357 26, 357 51, H01G 700, H01L 21308
Patent
active
042623995
ABSTRACT:
An array of electrostatic transducers is fabricated on a monolithic integrated circuit chip having provision for detection, amplification, and signal processing of received echoes. The transducer is multilayered with the form of a parallel plate capacitor, and is made by laterally etching an insulating layer through a small hole in the overlying layer to create a void region, then depositing a sealing layer to seal the etch holes. The upper metallic layers cover the transducer array and other monolithic circuitry and are etched to be interconnections for the various components.
REFERENCES:
patent: 3746950 (1973-07-01), Kano et al.
patent: 3758943 (1973-09-01), Shibata
patent: 3763408 (1973-10-01), Kano et al.
patent: 3786320 (1974-01-01), Kano et al.
patent: 3822467 (1974-07-01), Symersky
patent: 3837907 (1974-09-01), Berglund et al.
patent: 3941630 (1976-03-01), Larrabee
patent: 4004044 (1977-01-01), Franco et al.
patent: 4045594 (1977-08-01), Maddocks
patent: 4060427 (1977-11-01), Barile et al.
patent: 4078963 (1978-03-01), Symersky
Campbell Donald R.
Davis James C.
General Electric Co.
Massie Jerome W.
Snyder Marvin
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