Ultrasonic transducer array having laser-drilled vias for electr

Details Ultrasonic transducer array having laser-drilled vias for electr Ultrasonic transducer array having laser-drilled vias for electr

1994-12-30

1996-02-20

Jordan, Charles T.

Communications, electrical: acoustic wave systems and devices

Signal transducers

Underwater type

367140, 310334, 310336, 310365, 310366, H04R 1700, H01L 4104

Patent

active

054935415

ABSTRACT:
A system and process for electrically connecting all elements in a transducer array from one side. A flat block of piezoelectric ceramic material is patterned and drilled with a high-powered laser. The drilling is precisely controlled to define a series of vias which penetrate the ceramic block in the thickness direction. These vias facilitate electrical connection from one side of the ceramic block to the other side when the vias are sputtered or plated with electrically conductive material. In this way the electrodes on the front face of the transducer elements can be electrically connected from the rear to common ground or a signal source.

REFERENCES:
patent: 4890268 (1989-12-01), Smith et al.
patent: 5045746 (1991-09-01), Wersing et al.
patent: 5164920 (1992-11-01), Bast et al.
patent: 5267221 (1993-11-01), Miller et al.
patent: 5281888 (1994-01-01), Takeuchi et al.
patent: 5329496 (1994-07-01), Smith
patent: 5376857 (1994-12-01), Takeuchi et al.
patent: 5381385 (1995-01-01), Greenstein

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