Ultrasonic transducer array and manufacturing method thereof

Details Ultrasonic transducer array and manufacturing method thereof Ultrasonic transducer array and manufacturing method thereof

1995-01-18

1997-06-10

Chilcot, Richard

Measuring and testing

Vibration

By mechanical waves

7386127, H01L 4100

Patent

active

056378009

ABSTRACT:
An ultrasonic transducer array, and a method for manufacturing it, having a plurality of transducer elements aligned along an array axis in an imaging plane. Each transducer element includes a piezoelectric layer and one or more acoustic matching layers. The piezoelectric layer has a concave front surface overlayed by a front electrode and a rear surface overlayed by a rear electrode. The shape of each transducer element is selected such that it is mechanically focused into the imaging plane. A backing support holds the plurality of transducer elements in a predetermined relationship along the array axis such that each element is mechanically focused in the imaging plane.

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