Measuring and testing – Vibration – By mechanical waves
Reexamination Certificate
2007-04-24
2010-06-08
Saint Surin, J M (Department: 2856)
Measuring and testing
Vibration
By mechanical waves
C073S647000, C073S649000, C310S311000, C310S320000
Reexamination Certificate
active
07730785
ABSTRACT:
An ultrasonic sensor is provided with a substrate unit where a thin-walled portion is arranged and a piezoelectric oscillator which is formed at the substrate unit. The piezoelectric oscillator includes two electrodes and a piezoelectric film positioned between the two electrodes. The thin-walled portion and the piezoelectric oscillator construct a membrane structure which will resonate at a predetermined frequency.
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Sugiura Makiko
Wado Hiroyuki
Denso Corporation
M Saint Surin J
Posz Law Group , PLC
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