Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1998-09-24
2000-11-28
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310327, 310335, 310364, H01L 4108
Patent
active
061539678
ABSTRACT:
An ultrasonic probe has strip-formed oscillators formed of a piezoelectric crystal material arranged in an array form. Metal layers are formed by a first layer of at least one of Ti, Ni and Cr, a second layer of at least one of Cu and Ni, and a third layer of at least one of Cu, Au, Pt, Ag and Pd. A backing material is fixed to the oscillators through the metal layers. With this structure, it is possible to manufacture an ultrasonic probe having a high sensitivity while maintaining a favorable dicing process, even while using a backing material having a low acoustic impedance and soft properties.
REFERENCES:
patent: 3973152 (1976-08-01), Karplus
patent: 4259607 (1981-03-01), Noguchi et al.
patent: 4434384 (1984-02-01), Dunnrowicz et al.
patent: 4505160 (1985-03-01), Zacharias, Jr.
patent: 5406682 (1995-04-01), Zimnicki et al.
patent: 5818151 (1998-10-01), Takai et al.
Harada Kouichi
Kobayashi Tsuyoshi
Saitoh Shiroh
Shimanuki Senji
Yamashita Yohachi
Budd Mark O.
Kabushiki Kaisha Toshiba
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