Communications – electrical: acoustic wave systems and devices – Signal transducers – Underwater type
Patent
1989-04-12
1991-03-26
Jordan, Charles T.
Communications, electrical: acoustic wave systems and devices
Signal transducers
Underwater type
310335, 310336, 29 2535, 12866203, H04R 1700
Patent
active
050035169
ABSTRACT:
An ultrasonic probe comprising an acoustic lens (20) having a concave lens surface (21) formed on one side of a lens body, and a piezoelectric transducer (23) disposed on the other side of the acoustic lens, ultrasonic waves generated by applying voltage to the piezoelectric transducer being focused through the lens surface to detect the reflected waves of the ultrasonic waves from a sample (26) by the piezoelectric transducer for obtaining information about the surface or interior of the sample. The lens surface (21) of the acoustic lens (20) is defined by an etch profile (15) formed by etching a substrate material (11) which makes up the lens body.
REFERENCES:
IEEE 1986 Ultrasonics Symposium, Nov. 1986, vol. 2, pp. 745-748, "Planar-Structure Focusing Lens for Operation at 200 MHz and Its Application to the Reflection-Mode Acoustic Microscope", K. Yamada et al.
Applied Physics Letters, vol. 52, No. 10, Mar. 1988, pp. 836-837, "Chemically Etched Micromirrors in Silicon", D. L. Kendall et al.
RCA Review, vol. 31, No. 2, Jun. 1970, pp. 271-275, "The Etching of Deep Vertical-Walled Patterns in Silicon", A. I. Stoller.
IBM Technical Disclosure Bulletin, vol. 14, No. 2, Jul. 1971, p. 417, "Fabricating Shaped Grid and Aperture Holes", R. A. Leone et al.
Extended Abstracts/Electrochemical Society, vol. 87-2, Oct., 1987, p. 769, "Anisotropic Etching of Silicon for 3-D Microstructure Fabrication".
Electronics Letters, vol. 17, No. 15, Jul. 1981, pp. 520-522, "Linearly Focused Acoustic Beams for Acoustic Microscopy", J. Kushibiki et al.
Hashimoto Hisayoshi
Hatano Kazuyoshi
Ichiryuu Ken
Imai Kuninori
Ishikawa Isao
Eldred J. Woodrow
Hitachi , Ltd.
Hitachi Construction Machinery Co. Ltd.
Jordan Charles T.
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