Ultrasonic motor and guide apparatus having the same as...

Details Ultrasonic motor and guide apparatus having the same as... Ultrasonic motor and guide apparatus having the same as...

2005-05-24

2005-05-24

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S317000

Reexamination Certificate

active

06897598

ABSTRACT:
In a guide apparatus having an ultrasonic motor as a driving source of a stage, it is intended to accurately comprehend a degree of abrasion between a friction member of a frictionally driven ultrasonic motor and a drive transmitting member of the stage. A guide apparatus is constructed by an ultrasonic motor, a stage capable of moving on the basis of a friction driving with the ultrasonic motor, a position detecting means for detecting a position of the stage, a driving control portion for outputting a driving command signal to the ultrasonic motor, a non-contact type measuring means for measuring a position information of a friction member in the ultrasonic motor, a slip distance measuring portion for calculating a slip distance of the friction member in the ultrasonic motor, and a monitoring portion1equipped with tangential force measuring portion for calculating a tangential force applied to a driving surface of the drive transmitting member in the stage on the basis of the friction driving with the ultrasonic motor.

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