Ultrasonic microscope apparatus

Details Ultrasonic microscope apparatus Ultrasonic microscope apparatus

1983-12-27

1986-10-21

Chin, Gary

Boots, shoes, and leggings

364490, 73620, G06F 1520, G01N 2904

Patent

active

046189343

ABSTRACT:
An integrated circuit is operated under predetermined conditions. The operating integrated circuit is scanned by an ultrasonic beam. Ultrasonic images obtained by the scanning operation are stored into memories, mutually computed, and finally displayed by a color display.

REFERENCES:
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patent: 4240295 (1980-12-01), Uranishi
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patent: 4312229 (1982-01-01), Hurwitz et al.
patent: 4484820 (1984-11-01), Rosencwaig
patent: 4491020 (1985-01-01), Chubachi
"Acoustic Microscopy-Non-Destructive Analysis of Internal Microstructure", vol. 19, No. 6, Jun. 1979, Published in Circuit Manufacturing.
"High Resolution Ultrasonic System for the Real-Time Video Imaging of Internal Flaw" by Glenn et al, Published in Materials Evaluation, Jan. 1982.
Quate et al.,"Acoustic Microscopy with Mechanical Scanning-A Review," Proceedings of the IEEE, vol. 67, No. 8, Aug. 1979.
Hollis et al., "Defect Detection for Microelectronics by Acoustic Microscopy," Scanned Image Microscopy (Academic Press), 1980.

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