Ultrasonic micro spectrometer

Measuring and testing – Vibration – By mechanical waves

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73606, 73624, G01N 2910

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active

054026814

ABSTRACT:
An ultrasonic sensor for use in an ultrasonic micro spectrometer includes a concave surface transducer having a concave ultrasonic wave transmitting/receiving surface and a plane transducer having a plane transmitting/receiving surface. The concave surface transducer is capable of transmitting converging ultrasonic waves toward a specimen, wherein the waves are reflected from the surface of the specimen and are received by the plane transducer which outputs electric signals corresponding to the intensity of the reflected ultrasonic waves. Based on a signal output from the ultrasonic sensor, a digital oscilloscope and FFT analyzer forms a distribution of spectral intensity indicating the intensity of the reflected wave as a function of frequency. The digital oscilloscope and FFT analyzer further forms a distribution of spectral phase indicating the spectral phase of the reflected waves as a function of frequency. Either the distribution of spectral intensity or of spectral phase can effectively be analyzed for evaluating elastic characteristics and structure of a specimen.

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Ultrasonics International 89 Conference Proceedings "Measurements of the Layer Thickness and Adhesion with High Spatial Resolution by an Ultrasonic Micro Spectrometer", N. Nakaso et al.
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1990 Ultrasonics Symposium, "An Ultrasonic Micro-Spectrometer for the Evaluation of Elastic Properties with Microscopic Resolution" Y. Tsukahara et al.

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