Chemical apparatus and process disinfecting – deodorizing – preser – Shock or sound wave – Including supersonic or ultrasonic energy generation means
Patent
1994-05-12
1996-06-04
McMahon, Timothy M.
Chemical apparatus and process disinfecting, deodorizing, preser
Shock or sound wave
Including supersonic or ultrasonic energy generation means
12866001, 134 1, 310322, 366116, 366127, 422 20, B01F 1102, A61B 800, B06B 100
Patent
active
055230580
DESCRIPTION:
BRIEF SUMMARY
FIELD OF THE INVENTION
The present invention relates to an ultrasonic therapeutic apparatus suitable for medical treatment of malignant tumors and medical treatment of thrombi and calculi, an ultrasonic diagnostic apparatus having the function of generating ultrasonic cavitation for emphasizing an ultrasonic echo image of, for example, blood flow, an ultrasonic apparatus for accelerating chemical reactions, an ultrasonic cleaning apparatus for solid surfaces, an ultrasonic bubble generating apparatus or a sterilizing apparatus for liquid.
DESCRIPTION OF RELATED ART
A medical treatment of malignant tumors and a remedy for calculi which are based on irradiation of a converging high-intensity acoustic wave have been expected to serve as a noninvasive modality which does not depend on an operation and as a modality which makes much of the quality of life after an operation on a patient and increase their social value more and more in the future, too. Acoustic cavitation is considered to play an important role in generating the effect of medical treatment based on high-intensity focused acoustic wave irradiation. It has also been known that acoustic cavitation plays an important role also in accelerating chemical reactions and in cleaning based on ultrasound irradiation.
As a method of efficiently inducing the generation and collapse under pressure of acoustic cavitation for the above purposes, a technique has hitherto been reported as proposed in JP-A-2-126848, according to which ultrasonic waves are irradiated by switching acoustic fields at intervals of 1 to 100 msec. In this technique, based on the fact that the ultrasonic irradiation time, 1 to 100 msec, is needed for generation of acoustic cavitation, ultrasonic irradiation is carried out while switching acoustic fields of different wave fronts at intervals of the above time range whereby the cycle of generation of acoustic cavitation by one acoustic field and collapse under pressure of the acoustic cavitation by the other acoustic field is repeated. Through this, the efficiency of ultrasonic chemical reaction can be improved by an order of magnitude for the same ultrasonic power in comparison with the case without the switching of acoustic fields.
In a semiconductor device production process, high-density integration of devices prevails and concomitantly therewith, deposition of minute foreign matter on substrates or surface contamination affect the yield of products to a great extent. Therefore, the cleaning process becomes very important in the semiconductor device production process. When ultrasound is irradiated in a liquid containing a minute amount of gas, pressure increase and pressure reduction due to the ultrasound, which are waves of condensation and rarefaction, are caused in a local region, bubbles of a size corresponding to a frequency of the ultrasound are vibrated, and collapse under pressure of bubbles occurs because of a phenomenon called acoustic cavitation. It has been known that the cleaning effects are observed under the condition that acoustic cavitation takes place and by virtue of this characteristic, the acoustic cavitation phenomenon is widely used for cleaning processes; cleaning of semiconductor substrates, glasses or tableware.
Since the ultrasound changes its cleaning effect in accordance with the form of its irradiation, a variety of methods for improving the efficiency of cleaning by arranging the location where a portion is irradiated with ultrasound have been devised. However, such arrangements could not improve the cleaning efficiency sufficiently. For more efficient cleaning, a method is needed which can efficiently generate acoustic cavitation serving as a source of cleaning. As a conventional example in which an irradiation source of ultrasound is contrived in an ultrasonic cleaning apparatus, a cleaning apparatus as disclosed in JP-A-2-157078 has been devised which has a higher cleaning power than the case of ultrasound of a single frequency by having a source for generating ultrasonic waves of a plurality of fr
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Hiraiwa Atsushi
Kawabata Ken-ichi
Uchida Kenko
Umemura Shin'ichiro
Wada Yasuo
Carpenter Robert
Hitachi , Ltd.
McMahon Timothy M.
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