Ultrasonic interferometer

Details Ultrasonic interferometer Ultrasonic interferometer

1993-02-01

1994-12-20

Chilcot, Jr., Richard E.

Measuring and testing

Vibration

By mechanical waves

73627, G01N 2900

Patent

active

053737423

ABSTRACT:
A method of measuring thin film properties of materials using interference of ultrasonic waves in the frequency range of 2-15 MHz. An ultrasonic interferometer produces interference "fringes" from which the film thickness can be accurately determined. The film may consist of any solid material having known sonic properties and thickness of the order of the sonic wavelength. The device utilizes a narrow-band source of ultrasound and guided-wave propagation to accurately define the optical path of the ultrasonic waves producing the interference. The interferometer is also useful to measure certain material properties in thin specimens, thereby allowing the material to be characterized locally.

REFERENCES:
patent: 3886488 (1975-05-01), Bossaert
patent: 5271274 (1993-12-01), Khuri-Yakub et al.
"Fundamentals of Optics" by F. A. Jenkins & H. E. White, 3rd Edition, pp. 244-259 (pre-1976).
"Ultrasonic Testing of Materials" by J & H. Krautkramer, 4th Edition, pp. 222-224, Springer-Verlag, New York (1990).

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