Ultrasonic distance sensors

Details Ultrasonic distance sensors Ultrasonic distance sensors

2008-06-24

2008-06-24

Lobo, Ian J (Department: 3662)

Communications, electrical: acoustic wave systems and devices

Echo systems

Distance or direction finding

C073S597000, C073S627000, C073S29000R

Reexamination Certificate

active

07391676

ABSTRACT:
A lithographic apparatus comprises an illumination system, a support constructed to support a patterning device, and a projection system. In pixel grid imaging, a large number of small optical spots are imaged onto the substrate surface using a micro-lens array (MLA). The z position of the MLA is adjustable in order to focus the spots on the substrate surface and/or to compensate for differences in height of the substrate surface. The focusing adjustment is based on an output of an ultrasonic distance sensor provided in the vicinity of the substrate surface.

REFERENCES:
patent: 4145914 (1979-03-01), Newman
patent: 4561064 (1985-12-01), Bruggen et al.
patent: 4578997 (1986-04-01), Soltz
patent: 5226320 (1993-07-01), Dages et al.
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6687041 (2004-02-01), Sandstrom
patent: 6747783 (2004-06-01), Sandstrom
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 7148494 (2006-12-01), Bruinsma et al.
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0130561 (2004-07-01), Jain
patent: 2005/0007572 (2005-01-01), George et al.
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None

Affiliated with

Also associated with

Rating

Ultrasonic distance sensors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ultrasonic distance sensors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ultrasonic distance sensors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2814899