Ultrasonic cleaning apparatus

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion

Reexamination Certificate

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Details

C134S05600D, C134S0580DL, C134S902000, C134S001300, C310S317000, C310S334000, C366S114000, C366S127000

Reexamination Certificate

active

07108003

ABSTRACT:
Pluralities of ultrasonic transducers are arranged on the bottom wall of the cleaning tank. The output power of the ultrasonic oscillator is supplied to the transducers through the switching unit, which switches the drive mode between a first mode in which all the ultrasonic transducers are supplied with the output power and thus are excited, and a second mode in which only a part or parts of the ultrasonic transducers are supplied with the output power generated by the ultrasonic oscillator. The first mode is used when cleaning substrates not-resistant to vibration, and the second mode is used when cleaning substrates resistant to vibration.

REFERENCES:
patent: 2891176 (1959-06-01), Branson
patent: 4909266 (1990-03-01), Massa
patent: 5911232 (1999-06-01), Mokuo et al.
patent: 6019852 (2000-02-01), Pedziwiatr et al.
patent: 6148833 (2000-11-01), Tang et al.
patent: 6181051 (2001-01-01), Puskas
patent: 6554003 (2003-04-01), Birang et al.
patent: 8-196450 (1996-08-01), None
patent: 11-176784 (1999-07-01), None

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