Cleaning and liquid contact with solids – Apparatus – Electrically controlled
Patent
1982-04-05
1985-02-26
Fisher, Richard V.
Cleaning and liquid contact with solids
Apparatus
Electrically controlled
134184, 366127, B08B 312
Patent
active
045012857
ABSTRACT:
Ultrasonic transducer apparatus for cleaning applications and method for cleaning wafers of semiconductor material in which the method includes positioning the wafer proximate to but closely spaced away from a cleansing face of the ultrasonic transducer, supplying space between the cleansing face and the wafer with a cleansing fluid through an orifice in the cleansing surface and ultrasonically vibrating the cleansing face transversely to the wafer by applying an electrical signal to piezoelectric material symmetrically disposed about the orifice in the cleansing face via which the cleansing fluid is supplied, with the ultrasonic transducer including piezoelectric material symmetrically disposed with respect to the orifice in the cleansing face through which the cleansing fluid is supplied. The piezoelectric material is preferably in the form of a plurality of discreet piezoelectric elements which are provided with an input signal via a common input terminal where all of the plurality of piezoelectric elements are mechanically coupled to the cleansing face so that the piezoelectric elements, the mechanical coupling structure and a cleansing face ultrasonically vibrate as a single integral structure.
REFERENCES:
patent: 2498737 (1950-02-01), Holden
patent: 3094314 (1963-06-01), Kearney et al.
patent: 4064885 (1977-12-01), Dussault et al.
patent: 4183011 (1980-01-01), Massa
patent: 4401131 (1983-08-01), Lawson
Devine Janet
Irwin Charles
Kramer Richard
Fisher Richard V.
Jones W. Gary
Miller Austin R.
Sonobond Ultrasonics, Inc.
LandOfFree
Ultrasonic cleaning apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Ultrasonic cleaning apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ultrasonic cleaning apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-512668