Metal fusion bonding – Means to apply vibratory solid-state bonding energy to work
Patent
1996-02-12
1997-02-18
Heinrich, Samuel M.
Metal fusion bonding
Means to apply vibratory solid-state bonding energy to work
228 45, B23K 2010, H01L 21607
Patent
active
056034440
ABSTRACT:
To provide an ultrasonic bonding machine in which a resonator is arranged horizontally or vertically while it is supported at both ends and a resonator for use in the same. The interface Wa is placed on the mount 13 arranged in a stationary state in a lower portion of the working space 2 open in forward, right and left directions, the resonator 7 is moved down by the pressure mechanism 3 from above, and the interface Wa is pressure-held properly between the bonding working portion 11 and the mount 13 while it is in a stationary state and bonded with vibration energy of a vertical ultrasonic wave. The resonator 7 is assembled by interconnecting the ultrasonic horn having the bonding working portion 11 and two boosters having support portions by means of screws in such a manner that they are coaxial with one another, thereby facilitating exchange of each element. In addition, the resonator can be arranged vertically while it is supported at both ends in the front of the main body.
REFERENCES:
patent: 3038359 (1962-06-01), Jones et al.
patent: 3752380 (1973-08-01), Shoh
patent: 3863826 (1975-02-01), Shoh
patent: 4976392 (1990-12-01), Smith et al.
patent: 5460315 (1995-10-01), Boltz et al.
Heinrich Samuel M.
Ultex Corporation
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