Electricity: measuring and testing – Magnetic – Magnetometers
Reexamination Certificate
2008-03-18
2008-03-18
LeDynh, Bot (Department: 2862)
Electricity: measuring and testing
Magnetic
Magnetometers
C365S157000, C324S244000
Reexamination Certificate
active
07345475
ABSTRACT:
An ultrasensitive room temperature magnetoelectric thin film magnetometer is fabricated on a cantilever beam and includes an active magnetoelectric multilayer structure having a plurality of thin films formed at a region defined on the cantilever beam. Upon application of a magnetic field, the active magnetoelectric structure generates a corresponding response of an electrical nature which is a measure of a value of the applied magnetic field. The material of the cantilever beam may be removed beneath the active magnetoelectric multilayer structure to form a freestanding modification of the magnetometer with superior sensitivity. The active magnetoelectric multilayer structure is either a bi-layer structure which includes a piezoactive (piezoelectric and/or piezoresistive) thin film deposited in contact with a magnetostrictive thin film or a tri-layer active structure (in the free-standing implementation) including a piezoactive thin film sandwiched between a pair of magnetostrictive thin films.
REFERENCES:
patent: 4520413 (1985-05-01), Piotrowski et al.
patent: 6809515 (2004-10-01), Li et al.
M. Fiebig, “Revival of the magnetoelectric effect”, Journal of Physics D: Applied Physics 38, R123-R152 (2005).
S. Dong, et al., “Ultrahigh magnetic field sensitivity in laminates of TERFENOL-D and Pb(Mg1/3Nb2/3)O3-PbTiO3 crystal”, Appl. Phys. Lett., 83, 2265-2267 (2003).
K. Mori, et al., “Magnetoelectric coupling in Terfenol-D/polyvinylidenedifluoride composites”, Appl. Phys. Lett 81, 100-101 (2002).
G. Srinivasan, et al., “Magnetoelectric interactions in bilayers of yttrium iron garnet and lead magnesium niobate-lead titanate: Evidence for strong coupling in single crystals and epitaxial films”, Appl. Phys. Lett. 86, 222506-1-222506-3 (2005).
G. Srinivasan, et al., “Magnetoelectric interactions in hot-pressed nickel zinc ferrite and lead zirconante titanate composites”, Appl. Phys. Lett. 85, 2250-2552 (2004).
G. Srinivasan, et al., “Resonant magnetoelectric coupling in trilayers of ferromagnetic alloys and piezoelectric lead zirconate titanate: The influence of bias magnetic field”, Phys. Rev. B (Condensed Matter and Materials Physics) 71, 184423-1-6 (2005).
J. Ryu, et al., “Magnetoelectric Properties in Piezoelectric and Magnetostrictive Laminate Composites,” Jpn. J. Appl. Phys. 40, 4948-4951 (2001).
M. Murakami, et al., “Tunable multiferroic properties in nanocomposite PbTiO3-CoFe2O4 epitaxial thin films,” Applied Physics Letters 87, 112901-1-3 (2005).
C. Gao, et al., “Measurement of the magnetoelectric coefficient using a scanning evanescent microwave microscope,” Appl. Phys. Lett. 87, 153505-1-153505-3 (2005).
S. Dong, et al., “Enhanced magnetoelectric effects in laminate composites of Terfenol-D / Pb(Zr, Ti)O3 under resonant drive”, Appl. Phys. Lett. 83, 4812-4814 (2003).
S. Dong, et al., “Circumferential-mode , quasi-ring-type, magnetoelectric laminate composite—a highly sensitive electric current and/or vortex magnetic field sensor”, Appl. Phys. Lett., 86, 182506-1-182506-3 (2005).
S. Dong, et al., “Push-pull mode magnetostrictive/piezoelectric laminate composite with an enhanced magnetoelectric voltage coefficient”, Appl. Phys. Lett., 87, 062502-1-062502-3 (2005).
J. Park, et al., “Fabrication and properties of PZT micro cantilevers using isotropic silicon dry etching process by XeF2 gas for release process,” Sensors and Actuators, A 117, 1-7 (2005).
G. Kang, et al., “Fabrication and electromechanical properties of a self-actuating Pb(Zr0.52 Ti0.48)O3 microcantilever using a direct patternable sol-gel method,” Appl. Phys. Lett. 88, 042904-1-3 (2006).
B. Piekarski, Ph.D. thesis, “Lead zirconate titanate thin films for piezoelectric actuation and sensing of MEMS resonators,” University of Maryland (2005).
S.A. Mathews, et al., “The Effect of Substrate Constraint on the Martensitic Transformation of Ni-Ti Thin Films,” Metallurgical and Materials Transactions A, 27A, 2859-2861 (1996).
Q. Su, et al., “Young's Modulus of Amorphous Terfenol-D Thin Films,” J. Appl. Phys. 80, 3604-3606 (1996).
Q. Su, et al., “Graphoepitaxial NiTi shape memory thin films on Si,” Appl. Phys. Lett, 73, 750-752 (1998).
J. Morillo, et al., “Micromachined silicon torsional resonator for magnetic anistotropy measurement,” Rev. Sci. Instrum. vol. 69, No. 11, 3908-3912 (1998).
M. Wuttig, “Thin Film SMA/Si Composite Actuators,” Proc. SPIE-Int. Soc. Opt. Eng. (USA), Proceedings of the SPIE—The International Society for Optical Engineering, vol. 3984 p. 450-455 (2000).
O. Famodu, et al., “Combinatorial Investigation of Ferromagnetic Shape-Memory Alloys in the Ni-Mn-Al Ternary System Using a Composition Spread Technique,” Materials Transactions, JIM, vol. 45, No. 2, 173-177 (2004).
I. Takeuchi, et al., “Identification of novel compositions of ferromagnetic shape memory alloys using composition spreads,” Nature Materials vol. 2, 180-184 (2003).
Takeuchi Ichiro
Wuttig Manfred R.
Ledynh Bot
Rosenberg , Klein & Lee
University of Maryland
LandOfFree
Ultrasensitive magnetoelectric thin film magnetometer and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Ultrasensitive magnetoelectric thin film magnetometer and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ultrasensitive magnetoelectric thin film magnetometer and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2810142