Ultraminiature pressure sensor with addressable read-out circuit

Details Ultraminiature pressure sensor with addressable read-out circuit Ultraminiature pressure sensor with addressable read-out circuit

1990-12-21

1992-05-19

Howell, Kyle L.

Surgery

Truss

Pad

128673, 128748, 73714, 73718, 73724, A61B 50215, G01L 912

Patent

active

051138689

ABSTRACT:
A capactive pressure sensor suitable for making highly sensitive, low pressure measurements is disclosed. The sensor may be mounted into a 0.5 mm OD catheter suitable for multipoint pressure measurements from within the coronary artery of the heart. The sensor employs a transducer which consists of a rectangular bulk silicon micro-diaphragm several hundred microns on a side by two microns thick, surrounded by a supporting bulk silicon rim about 12 microns thick. Both the diaphragm and the rim are defined by a double diffusion etch-stop technique. The transducer fabrication process features a batch wafer-to-glass electrostatic seal followed by a silicon etch, which eliminates handling of individual small diaphragm structures until die separation and final packaging. An addressable read-out interface circuit may be used with the sensor to provide a high-level output signal, and allows the sensor to be compatible for use on a multisite catheter having only two electrical leads.

REFERENCES:
patent: 4815472 (1989-03-01), Wise et al.
patent: 4881410 (1989-11-01), Wise et al.
Lee et al., "A Batch-Fabricated Silicon Capacitive Pressure Transducer . . . " IEEE Trans. Elec. Dev., Jan. 1982.

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