Ultraminiature pressure sensor and method of making same

Details Ultraminiature pressure sensor and method of making same Ultraminiature pressure sensor and method of making same

1988-05-04

1989-11-21

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73718, 361283, G01L 708, G01L 912

Patent

active

048814105

ABSTRACT:
A capacitive pressure sensor suitable for making highly sensitive, low pressure measurements is disclosed. The sensor may be mounted into a 0.5 mm OD catheter suitable for multipoint pressure measurements from within the coronary artery of the heart. The sensor employs a transducer which consists of a rectangular bulk silicon micro-diaphragm several hundred microns on a side by two microns thick, surrounded by a supporting bulk silicon rim about 12 microns thick. Both the diaphragm and the rim are defined by a double diffusion etch-stop technique. The transducer fabrication process features a batch wafer-to-glass electrostatic seal followed by a silicon etch, which eliminates handling of individual small diaphragm structures until die separation and final packaging. An addressable read-out interface circuit may be used with the sensor to provide a high-level output signal, and allows the sensor to be compatible for use on a multisite catheter having only two electrical leads.

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