Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Composite having voids in a component
Reexamination Certificate
2008-04-15
2008-04-15
Zimmerman, John J. (Department: 1794)
Stock material or miscellaneous articles
Web or sheet containing structurally defined element or...
Composite having voids in a component
C174S13800J, C257S632000, C257S646000, C257SE21277, C428S304400, C428S315700, C438S789000, C438S790000
Reexamination Certificate
active
11034479
ABSTRACT:
A method for forming a ultralow dielectric constant layer with controlled biaxial stress is described incorporating the steps of forming a layer containing Si, C, O and H by one of PECVD and spin-on coating and curing the film in an environment containing very low concentrations of oxygen and water each less than 10 ppm. A material is also described by using the method with a dielectric constant of not more than 2.8. The invention overcomes the problem of forming films with low biaxial stress less than 46 MPa.
REFERENCES:
patent: 2005/0156285 (2005-07-01), Gates et al.
patent: 2005/0194619 (2005-09-01), Edelstein et al.
patent: 2006/0079099 (2006-04-01), Nguyen et al.
Dimitrakopoulos Christos Dimitrios
Gates Stephen McConnell
Grill Alfred
Lane Michael Wayne
Liniger Eric Gerhard
Austin Aaron
Scully , Scott, Murphy & Presser, P.C.
Trapp, Esq. Robert M.
Zimmerman John J.
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