Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Composite having voids in a component
Reexamination Certificate
2008-04-15
2008-04-15
Zimmerman, John J. (Department: 1794)
Stock material or miscellaneous articles
Web or sheet containing structurally defined element or...
Composite having voids in a component
C174S13800J, C257S632000, C257S646000, C257SE21277, C428S304400, C428S315700, C438S789000, C438S790000
Reexamination Certificate
active
07357977
ABSTRACT:
A method for forming a ultralow dielectric constant layer with controlled biaxial stress is described incorporating the steps of forming a layer containing Si, C, O and H by one of PECVD and spin-on coating and curing the film in an environment containing very low concentrations of oxygen and water each less than 10 ppm. A material is also described by using the method with a dielectric constant of not more than 2.8. The invention overcomes the problem of forming films with low biaxial stress less than 46 MPa.
REFERENCES:
patent: 2005/0156285 (2005-07-01), Gates et al.
patent: 2005/0194619 (2005-09-01), Edelstein et al.
patent: 2006/0079099 (2006-04-01), Nguyen et al.
Dimitrakopoulos Christos Dimitrios
Gates Stephen McConnell
Grill Alfred
Lane Michael Wayne
Liniger Eric Gerhard
Austin Aaron
International Business Machines - Corporation
Scully , Scott, Murphy & Presser, P.C.
Trapp, Esq. Robert M.
Zimmerman John J.
LandOfFree
Ultralow dielectric constant layer with controlled biaxial... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Ultralow dielectric constant layer with controlled biaxial..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ultralow dielectric constant layer with controlled biaxial... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2768049