Ultrahigh vacuum focused ion beam micromill and articles therefr

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Details

2504922, 2504923, 369101, G06F 1900, A61N 500

Patent

active

057216878

ABSTRACT:
An ultrahigh vacuum focused ion beam micromilling apparatus and process are isclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters.

REFERENCES:
patent: 5401972 (1995-03-01), Talbot et al.
patent: 5402410 (1995-03-01), Yoshimura et al.
patent: 5453594 (1995-09-01), Konecny

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