Ultrafine particles and production method thereof

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from solid or gel state – Organic product

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501 90, 501 92, 501 95, C30B 106

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active

057727546

ABSTRACT:
An electron beam of more than 1.times.10.sup.19 e/cm.sup.2 .multidot.sec is irradiated to metastable metal oxide particles such as .theta.-Al.sub.2 O.sub.3 particles or the like disposed on an amorphous carbon film. A phase transformation or the like of the metastable metal oxide particles is occurred by the electron beam irradiation. Thus, stable metal oxide ultrafine particles such as an .alpha.-Al.sub.2 O.sub.3 ultrafine particle 2 whose diameter is more tiny than the metastable metal oxide particles used, and a metal ultrafine particle composed of an oxide such as Al ultrafine particles are produced.

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patent: 5554670 (1996-09-01), Giannelis et al.
Bingshe Xu et al., "Phase Transformation and Bonding of Ceramic Nanoparticles in a Tem" in Proceedings of the Second International Conference on Nanostructured Materials, vol. 6, 1995, pp. 727-730.
Materials Letters, J. Herley, "Ultra-fine Particles of Aluminum Formed by Electron-Beam-Induced Decomposition of Aluminum Hydride", vol. 7, No. 12, Mar. 1989 pp. 441-444.
Journal of Crystal Growth, Kaito et al., "Structure and Crystallization Process of Thin Film Prepared By Vacuum Evaporation of SnO2 Powder", vol. 79, 1986, pp. 403-409.

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