Ultrafine particles and method and apparatus for producing...

Specialized metallurgical processes – compositions for use therei – Processes – Producing solid particulate free metal directly from liquid...

Reexamination Certificate

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C075S345000, C075S367000, C204S192320, C977S888000, C264S430000

Reexamination Certificate

active

10994614

ABSTRACT:
A method of producing ultrafine particles by vaporization comprising: vaporizing a target by sputtering; causing particles that fly from the target by vaporization to be deposited on an oil surface; and recovering the oil on which the flown particles have deposited to obtain individually dispersed ultrafine particles.

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S. Yatsuya et al., “Preparation of Extremely Fine Particles by Vacuum Evaporation Onto a Running Oil Substrate,”Journal of Crystal Growth, 45 (1978), pp. 490-494.

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