Ultrafast electro-dynamic X, Y and Theta Positioning Stage

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means

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318687, 318653, G05B 106

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active

051534940

ABSTRACT:
The invention discloses an Ultrafast Electro-Dynamic X, Y and Theta Positioning Stage. A positioning stage made according to this invention allows light payloads to be moved with extremely high linear and angular accelerations over finite distances and angles with a plane. An important feature of this invention is a momentum-cancelling design which allows reaction forces and torques on the fixed member to approach zero, thereby, allowing for a smooth and an ultrafast performance by the positioning stage.

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Ralph L. Hollis, Jr., et al, "Robotic Circuit Board Testing Using Fine Positioners with Fiber-Optic Sensing," IBM Engineering Technology Research Report, No. RC 11164 (#50243) pp. 1-14 (May 21, 1985).
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