Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1994-04-29
1995-08-15
Karlsen, Ernest F.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324 96, 324752, G01R 3128, G01R 3102
Patent
active
054423007
ABSTRACT:
An ultrafast scanning probe with 2.5-picosecond response time and 10-nanometer spatial resolution. In one embodiment, a single probe tip is formed on an input electrode layer which is at least partially formed on a cantilever portion of the probe. The cantilever portion is formed by at least one layer including a film of AlGaAs which has a reflective top surface to reflect a laser beam therefrom. A photoresponsive planar switch is formed by a portion of the input electrode layer, a semiconductor portion of the at least one layer and a portion of an output electrode layer. In another embodiment, the switch is a non-planar photoresponsive switch. The single probe tip of the probe is utilized to both acquire an image of an electronic device and measure electrical signals of the device. An optical fiber may be used for support and to supply a pulsed switching beam to the photoresponsive switch.
REFERENCES:
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S. Weiss, D. F. Ogletree, M. Salmeron and D. S. Chemia, "Ultrafast Scanning Probe Microscopy", Appl. Phys. Lett. 63 (18) Nov. 1, 1993.
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J. Nees, S. Williamson, J. Kim and S. Gupta, "Picosecond Detector, Optical Temporal Analyzer and Free-Standing Circuit Probe", OSA Proceedings on Ultrafast Electronics and Optoelectronics, 1993, vol. 14, Jagdeep Shah and Umest Mishra (eds.) p. 186.
Joungho Kim, Steven Williamson, John Nees, Shin Ichi Wakana and John Whitaker, Photoconductive Sampling Probe with 2.3 ps. Temporal Resolution and 4-.mu.V Sensitivity, Appl. Phys. Lett., 62 (18), May 3, 1993; and.
C. A. Spindt, I. Brodie, L. Humphery & E. R. Westerberg, "Physical Properties of Thin-Film Emission Cathodes with Molybdenum Cones", J. of Appl. Phys. 42 (12), Dec. 1976.
Nees John A.
Wakana Shin-ichi
Fujitsu Limited
Karlsen Ernest F.
Kobert Russell M.
Regents of the University of Michigan
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