Ultraclean robotic material transfer method

Details Ultraclean robotic material transfer method Ultraclean robotic material transfer method

1989-07-31

1991-04-30

Werner, Frank E.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

414217, 414331, 414416, 414225, 4147442, 414752, 118719, 901 40, B65G 110

Patent

active

050113666

ABSTRACT:
An automatic wafer handling system utilizing a vacuum pneumatic controlled cable driving mechanism. In principle, the necessary movements are provided by air cylinder actuation of pulley supported cables. This application of vacuum force is substituted in place of positive air pressure, offering simplicity, reliability and stability by its use. Further advantages include the elimination of electric motor driving elements, thereby providing significant reduction of particulate and dust contamination problems. System operation includes the use of vacuum in the pickup of wafers, in manipulation and transport by cable drive, and motion control by means of air cylinders using negative air pressure.

REFERENCES:
patent: 3823836 (1974-07-01), Cheney et al.
patent: 4687542 (1987-08-01), Davis et al.
patent: 4746256 (1988-05-01), Boyle et al.
patent: 4808059 (1989-02-01), Eddy
patent: 4917556 (1990-04-01), Stark et al.

Affiliated with

Also associated with

Rating

Ultraclean robotic material transfer method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ultraclean robotic material transfer method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ultraclean robotic material transfer method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-637407