Ultra-violet lithographic resist composition and process

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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430193, 430326, 524108, G03C 154, G03C 500, G03C 172

Patent

active

043395228

ABSTRACT:
Phenolic-aldehyde resins sensitized with Meldrum's diazo or a homologue thereof are useful as lithographic resists sensitive to deep ultra-violet light.

REFERENCES:
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patent: 3661582 (1972-05-01), Broyde
patent: 3950173 (1976-04-01), Ross
patent: 4093461 (1978-06-01), Loprest
patent: 4123279 (1978-10-01), Kobayashi
patent: 4207107 (1980-06-01), Ross
patent: 4284706 (1981-08-01), Clecok et al.
Kammula, S. et al., J. Org. Chem., vol. 42, No. 17, pp. 2931-2932, 1977.
Dinaburg, M. S., "Photosensitive Diazo Compounds", Focal Press, pp. 31-32 and 181-182, 1964.

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