Coating processes – Direct application of electrical – magnetic – wave – or... – Polymerization of coating utilizing direct application of...
Patent
1995-09-01
1997-08-26
Breneman, R. Bruce
Coating processes
Direct application of electrical, magnetic, wave, or...
Polymerization of coating utilizing direct application of...
427226, 438781, 438789, 438939, H01L 21306
Patent
active
056610920
ABSTRACT:
Ultra thin organo-ceramic and metal oxide films are prepared under room temperature and atmospheric conditions by exposing .alpha.,.omega.-functional siloxane oligomers and fatty acid metal soaps, respectively, to a combination of ultraviolet light (UV) and ozone (O.sub.3). The process includes the steps of preparing ultra thin .alpha.,.omega.-functional polysiloxane and fatty acid metal soap films using, but not limited to, the Langmuir-Blodgett (LB) technique. The LB technique permits construction of molecular monolayer or multilayer films on a variety of substrates. By using carboxylic acid end groups on the siloxane oligomers, metal ions can be incorporated into the SiOx film after UV-ozone exposure. This technique can be used to make electronically, optically, and chemically important organo-ceramic and metal oxide films on temperature sensitive substrates.
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Koberstein Jeffrey T.
Mirley Christopher L.
Breneman R. Bruce
The University Of Connecticut
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