Ultra-short wavelength x-ray system

Details Ultra-short wavelength x-ray system Ultra-short wavelength x-ray system

2008-01-22

2008-01-22

Rodriguez, Armando (Department: 2828)

Coherent light generators

Free electron laser

C372S073000

Reexamination Certificate

active

10752604

ABSTRACT:
A method and apparatus to generate a beam of coherent light including x-rays or XUV by colliding a high-intensity laser pulse with an electron beam that is accelerated by a synchronized laser pulse. Applications include x-ray and EUV lithography, protein structural analysis, plasma diagnostics, x-ray diffraction, crack analysis, non-destructive testing, surface science and ultrafast science.

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