Ultra pure water filtration

Details Ultra pure water filtration Ultra pure water filtration

1994-05-06

1996-05-21

Fortuna, Ana

Liquid purification or separation

Processes

Liquid/liquid solvent or colloidal extraction or diffusing...

210650, 210653, 210900, 210636, 21050026, B01D 6100

Patent

active

055186246

ABSTRACT:
Ceramic filtration of a feed solution of ultra pure water and particle contaminants is disclosed through a metal oxide membrane on ceramic support. In one aspect, the filtering of ultra pure water from a feed solution containing ultra pure water and contaminant particles includes passing the feed solution cross-flow through a multi-channel sintered monolithic metal oxide membrane on ceramic support to form a permeate of particle-free ultra pure water. The sintered metal oxide membrane has a nominal pore size in the range of about 50 to 200 Angstroms. Although high recoveries per pass rates were used, no detectable aluminum ions were found in the ultra pure water. In another aspect, the apparatus and process of the present invention for filtering ultra pure water includes cross-flow filtration using multichannel monolithic ceramic membranes at suitable pore sizes in a total chemical process system including ozonation sterilization of the ceramic membrane particle filter in water purification applications for electronics manufacturing.

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Collentro, "Filtration: An Overview of Present and Future UF Technologies for Semiconductor, Pharmaceutical, and Power Applications," Ultrapure Water, pp. 20-31, Sep. 1993.
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Pate, "Filtration: Ozone Compatibility Study of DI Water Filters," Ultrapure Water, pp. 42-50, Sep. 1990.

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