Ultra pure gases: removal of halocarbons, fluorocarbons, and sul

Gas separation: processes – Solid sorption – Inorganic gas or liquid particle sorbed

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Details

95135, 95136, 95142, 95143, 96132, 96135, B01D 5304, B01D 5326

Patent

active

060744596

ABSTRACT:
A process for removing sulfur-containing compounds and halocarbons such as fluorocarbons and chlorocarbons from gases to provide gas streams which contain these compounds at unprecedentedly low levels using an adsorption train of four beds has been developed. The first bed serves to remove water, the second and third beds remove sulfur-containing compounds generally, and the fourth adsorbent bed removes sulfur-containing compounds and halocarbons such as chlorocarbons and fluorocarbons to very low levels.

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