Ultra-pure epitaxial silicon

Details Ultra-pure epitaxial silicon Ultra-pure epitaxial silicon

1984-09-06

1990-01-02

Dixon, Jr., William R.

Chemistry of inorganic compounds

Silicon or compound thereof

Elemental silicon

423349, 156613, 437 81, 148 330, C01B 3302

Patent

active

048912018

ABSTRACT:
Production of epitaxial silicon by thermal decomposition or hydrogen reduction of bromosilanes or iodosilane is disclosed.

REFERENCES:
patent: 2938772 (1960-05-01), Enk et al.
patent: 4084024 (1978-04-01), Schumacher
patent: 4279688 (1981-07-01), Abrahams et al.
Silicon Semiconductor Technology by W. R. Runyan (1965) McGraw-Hill p. 65.

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