Ultra-precision positioning system

Details Ultra-precision positioning system Ultra-precision positioning system

2007-07-17

2007-07-17

Fenstermacher, David M. (Department: 3682)

Machine element or mechanism

Control lever and linkage systems

Multiple controlling elements for single controlled element

C074S490090, C073S105000

Reexamination Certificate

active

10474825

ABSTRACT:
Provided is an ultra-precision positioning system. The system comprises a base, a motion stage movably provided to the top of the base, and first to sixth feeding mechanisms for moving the motion stage to have six degrees of freedom. The first to sixth feed mechanisms are fixed to the base and the motion stage, respectively. Each of the first to third feeding mechanisms has a piezo actuator and two elastic hinges provided at both sides of the piezo actuator. Each of the fourth to sixth feeding mechanisms has a piezo actuator, three hinge members, and a lever member with a notch hinge which operatively cooperates with the hinge members.

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patent: 2005/0231075 (2005-10-01), Xu
patent: 2006/0098184 (2006-05-01), Shibazaki

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