Ultra-narrow band flourine laser apparatus

Coherent light generators – Particular active media – Gas

Reexamination Certificate

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C372S058000, C372S059000

Reexamination Certificate

active

06839373

ABSTRACT:
An ultra-narrow band fluorine laser apparatus is provided in which a line width of a fluorine laser can be narrowed to about 0.2 to 0.3 pm without using any band-narrowing element such as an etalon. In an oscillator11, a laser chamber15is provided in a stable type resonator constituted by an output mirror13and a totally reflecting mirror14. The laser chamber15is filled with a laser gas at about 0.8 atm. As a result, when discharge is caused in the laser chamber15to cause laser oscillation, laser light L10in a bandwidth of about 0.3 pm is provided. The power of the laser light L10is increased by an amplifier12. The amplifier12emits laser light L20in a bandwidth of about 0.3 pm having laser energy of 10 mJ or more.

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