Ultra-miniature optical pressure sensing system

Details Ultra-miniature optical pressure sensing system Ultra-miniature optical pressure sensing system

2005-03-22

2005-03-22

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

By loading of specimen

C403S125000

Reexamination Certificate

active

06868736

ABSTRACT:
The fiber optic pressure sensing system includes a sensor housing formed using MEMS processing. The sensor housing has ribs and grooves in both horizontal and vertical directions relative to the surface to allow the membrane to flex in a consistent manner. The flexing of the membrane allows the pedestal to be repeatedly positioned in response to pressure acting on the extension of the sensor head and membrane.

REFERENCES:
patent: 2131738 (1938-10-01), Hoyt
patent: 4493212 (1985-01-01), Nelson
patent: 5291014 (1994-03-01), Brede et al.

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