Ultra-miniature multi-hole probes having high frequency,...

Details Ultra-miniature multi-hole probes having high frequency,... Ultra-miniature multi-hole probes having high frequency,...

2010-01-13

2011-12-06

Allen, Andre (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S756000

Reexamination Certificate

active

08069732

ABSTRACT:
Embodiments of an ultra miniature pressure probe are disclosed. The pressure probe can include a probe body, a plurality of transducer ports, and a plurality of transducers. The probe body can be a longitudinal tubular body having a front conical end. The transducer ports can be disposed about the front end of the body. The transducers can be leadless SOI transducers, each having an active deflection area associated with a semiconductor substrate. Each transducer can be in communication with a header for supporting the transducer. The header can have a thickness substantially less than the probe diameter and can comprise a flange about an edge of the header. Each of the plurality of transducer ports can define an aperture and a counter-bore, wherein each transducer is positionable in an associated transducer port with the flange of the header of the transducer being welded to the counter-bore of the transducer port.

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