Ultra low thermal expansion transparent glass ceramics

Details Ultra low thermal expansion transparent glass ceramics Ultra low thermal expansion transparent glass ceramics

2007-06-05

2007-06-05

Group, Karl (Department: 1755)

Compositions: ceramic

Ceramic compositions

Devitrified glass-ceramics

C501S007000

Reexamination Certificate

active

10773934

ABSTRACT:
There are provided glass-ceramics having an ultra low thermal expansion property and super flat surface capable of coping with lithography for the next generation LSI and component parts for semiconductor equipment such as masks, optical reflecting mirrors, wafer stages and reticle stages and various precision parts using such glass-ceramics. Glass-ceramics of the invention have an average linear thermal expansion coefficient within a range of 0.0±0.2×10−7/° C. within a temperature range from 0° C. to 50° C., have difference between the maximum value and the minimum value of ΔL/L of 10×10−7or below, and comprise SiO2, Al2O3and P2O5with the total amount thereof in mass % being within a range from 86.0% to 89.0%.

REFERENCES:
patent: 3642504 (1972-02-01), Petzold et al.
patent: 4851372 (1989-07-01), Lindig et al.
patent: 5017519 (1991-05-01), Morimoto et al.
patent: 5064460 (1991-11-01), Aitken
patent: 5336643 (1994-08-01), Goto et al.
patent: 5591682 (1997-01-01), Goto
patent: 5922271 (1999-07-01), Semar et al.
patent: 5972816 (1999-10-01), Goto
patent: 6001445 (1999-12-01), Itoh et al.
patent: 6197710 (2001-03-01), Ohara et al.
patent: 6387509 (2002-05-01), Goto et al.
patent: 6514890 (2003-02-01), Nagata et al.
patent: 6593258 (2003-07-01), Shimatani et al.
patent: 6673729 (2004-01-01), Siebers et al.
patent: 2002/0022564 (2002-02-01), Minamikawa et al.
patent: 2003/0099062 (2003-05-01), Kataoka et al.
patent: 2003/0125184 (2003-07-01), Mitra
patent: 1902432 (1976-10-01), None
patent: 11-292616 (1999-10-01), None
patent: 2001-150452 (2001-06-01), None
patent: 2003-192385 (2003-07-01), None
EPO Search Report, Dec. 21, 2004.

Affiliated with

Also associated with

Rating

Ultra low thermal expansion transparent glass ceramics does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ultra low thermal expansion transparent glass ceramics, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ultra low thermal expansion transparent glass ceramics will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3869597