Refrigeration – Processes – Exchanging heat between plural systems – e.g. – disparate
Reexamination Certificate
2006-09-26
2006-09-26
Tanner, Harry B. (Department: 3744)
Refrigeration
Processes
Exchanging heat between plural systems, e.g., disparate
C062S175000, C062S335000
Reexamination Certificate
active
07111467
ABSTRACT:
Disclosed is an ultra-low temperature, dual-compressor (114,144), recirculating gas chilling system that includes a closed-loop mixed-refrigerant primary refrigeration system (110) in combination with a closed-loop gas secondary refrigeration loop (112). The ultra-low temperature, dual-compressor (114,144), recirculating gas chilling system disclosed is capable of providing continuous long term chilled gas and fast cooling of a high or ambient temperature object (158), such as a chuck used in processing semiconductor wafers or any such device. The gas chilling system is characterized by three modes of operation: a normal cooling mode, a bakeout mode, and a post-bake cooling mode.
REFERENCES:
patent: 3590595 (1971-07-01), Briggs
patent: 4122688 (1978-10-01), Mochizuki et al.
patent: 4506521 (1985-03-01), Asano et al.
patent: 4535597 (1985-08-01), Missimer et al.
patent: 4535598 (1985-08-01), Mount
patent: 4597267 (1986-07-01), Forrest
patent: 4597268 (1986-07-01), Andersson
patent: 4763486 (1988-08-01), Forrest et al.
patent: 4788829 (1988-12-01), Takemasa et al.
patent: 4831835 (1989-05-01), Beehler et al.
patent: 4850199 (1989-07-01), DiNovo et al.
patent: 4926658 (1990-05-01), Olsen et al.
patent: 5076067 (1991-12-01), Prenger et al.
patent: 5087381 (1992-02-01), Tamura et al.
patent: 5170639 (1992-12-01), Datta
patent: 5182920 (1993-02-01), Matsuoka et al.
patent: 5337572 (1994-08-01), Longsworth
patent: 5339654 (1994-08-01), Cook et al.
patent: 5396777 (1995-03-01), Martin
patent: 5425890 (1995-06-01), Yudin et al.
patent: 5441658 (1995-08-01), Boyarsky et al.
patent: 5524442 (1996-06-01), Bergman, Jr. et al.
patent: 5579654 (1996-12-01), Longsworth et al.
patent: 5640854 (1997-06-01), Fogt et al.
patent: 5644502 (1997-07-01), Little
patent: 5685163 (1997-11-01), Fujita et al.
patent: 5702632 (1997-12-01), Weng
patent: 5715694 (1998-02-01), Yakumaru et al.
patent: 5724832 (1998-03-01), Little et al.
patent: 5730216 (1998-03-01), Viegas et al.
patent: 5749243 (1998-05-01), Lester
patent: 5910161 (1999-06-01), Fujita et al.
patent: 6006542 (1999-12-01), Tojo et al.
patent: 6017205 (2000-01-01), Weatherston et al.
patent: 6041621 (2000-03-01), Olszewski et al.
patent: 6055827 (2000-05-01), Tojo et al.
patent: 6073454 (2000-06-01), Spauschus et al.
patent: 6076366 (2000-06-01), Takano et al.
patent: 6076368 (2000-06-01), Noble
patent: 6076372 (2000-06-01), Acharya et al.
patent: 6089033 (2000-07-01), Dubé
patent: 6098421 (2000-08-01), Fujita et al.
patent: 6105388 (2000-08-01), Acharya et al.
patent: 6112534 (2000-09-01), Taras et al.
patent: 6112547 (2000-09-01), Spauschus et al.
patent: 6148634 (2000-11-01), Sherwood
patent: 6167722 (2001-01-01), Kasezawa et al.
patent: 6176102 (2001-01-01), Novak et al.
patent: 6189329 (2001-02-01), Peterson
patent: 6206652 (2001-03-01), Caillat
patent: RE37119 (2001-04-01), Sherwood
patent: 6233955 (2001-05-01), Egara
patent: 6258292 (2001-07-01), Turner
patent: 6293335 (2001-09-01), Tawney et al.
patent: 6301923 (2001-10-01), Bonaquist et al.
patent: 6306803 (2001-10-01), Tazaki
patent: 6330811 (2001-12-01), Arman
patent: 6474082 (2002-11-01), Flynn
patent: 6481223 (2002-11-01), Flynn et al.
patent: 6502410 (2003-01-01), Podtchereniaev et al.
patent: 6560981 (2003-05-01), Flynn
patent: 6574978 (2003-06-01), Flynn et al.
patent: 6644067 (2003-11-01), Stenhouse
patent: 6722145 (2004-04-01), Podtchereniaev et al.
patent: 6843065 (2005-01-01), Flynn
patent: 2001/0042379 (2001-11-01), Flynn et al.
patent: 2002/0017106 (2002-02-01), Flynn et al.
patent: 2002/0023447 (2002-02-01), Podtchereniaev et al.
patent: 198 21 308 (1999-11-01), None
patent: 05118677 (1993-05-01), None
Apparao Tamirisa V. V. R.
Boiarski Mikhail
Flynn Kevin P.
Hall Paul
Lachenbruch Roger
Brooks Automation Inc.
Hamilton Brook Smith & Reynolds P.C.
Tanner Harry B.
LandOfFree
Ultra-low temperature closed-loop recirculating gas chilling... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Ultra-low temperature closed-loop recirculating gas chilling..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ultra-low temperature closed-loop recirculating gas chilling... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3534636