Ultra-low noise MEMS piezoelectric accelerometers

Details Ultra-low noise MEMS piezoelectric accelerometers Ultra-low noise MEMS piezoelectric accelerometers

2007-09-26

2010-12-14

Chapman, John E (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514360, C073S514380

Reexamination Certificate

active

07849745

ABSTRACT:
Sensing structures are provided which are designed using non-conventional designs. These sensing structures have improved sensitivity and noise floor at low frequencies.

REFERENCES:
patent: 5209117 (1993-05-01), Bennett
patent: 5412986 (1995-05-01), Beringhause et al.
U.S. Appl. No. 11/097,059, filed Mar. 31, 2005, Wang et al.
F. Gerfers, et al., “Fabrication and Characterization of Bulk-micromachined Accelerometers Based on AIN Piezoelectric Sensing and SOI Wafers”, Proceedings of Eurosensors, Sep. 2006.
L.-P. Wang, et al., “Design, Fabrication, and Measurement of High-Sensitivity Piezoelectric Microelectromechanical Systems Accelerometers,” IEEE Micromechanical Systems, vol. 12, No. 4, Aug. 2003.
F. Levinzon, “Fundamental Noise Limit of Piezoelectric Accelerometer”, IEEE Sensors Journal, vol. 4, No. 1, Feb. 2004.
Christopher McLean and Dave Wolfe, “Intelligent Wireless” Techkor Instrumentation, Machine Monitoring/Networking, Jun. 2002 http://archives.sensorsmag.com/articies/0602/14/main.shtml.

Affiliated with

Also associated with

Rating

Ultra-low noise MEMS piezoelectric accelerometers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ultra-low noise MEMS piezoelectric accelerometers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ultra-low noise MEMS piezoelectric accelerometers will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4238169