Ultra-low energy micro-fluid ejection device

Details Ultra-low energy micro-fluid ejection device Ultra-low energy micro-fluid ejection device

2007-02-20

2007-02-20

Stephens, Juanita D. (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S064000, C347S056000, C029S611000

Reexamination Certificate

active

10986338

ABSTRACT:
A micro-fluid ejection device for ultra-small droplet ejection and method of making a micro-fluid ejection device. The micro-fluid ejection device includes a semiconductor substrate containing a plurality of thermal ejection actuators disposed thereon. Each of the thermal ejection actuators includes a resistive layer and a protective layer for protecting a surface of the resistive layer. The resistive layer and the protective layer together define an actuator stack thickness. The actuator stack thickness ranges from about 500 to about 2000 Angstroms and provides an ejection energy per unit volume of from about 10 to about 20 gigajoules per cubic meter. A nozzle plate is attached to the semiconductor substrate to provide the micro-fluid ejection device.

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