Ultra low contact area end effector

Details Ultra low contact area end effector Ultra low contact area end effector

2007-11-13

2007-11-13

Crawford, Gene O. (Department: 3652)

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

C414S941000

Reexamination Certificate

active

11404536

ABSTRACT:
The present invention comprises a vacuum end effector having workpiece supports that work in conjunction with distorted workpiece surfaces. In one embodiment, each workpiece support has the ability to gimbal and conform the workpiece surface in contact with an outer edge of the support. Each workpiece support preferably provides a knife-like contact edge to minimize the contact area between the support and the workpiece while still providing an effective vacuum area to hold the wafer securely on the support. In another embodiment, each workpiece support is replaceable without having to remove the end effector from the robot assembly

REFERENCES:
patent: 4620738 (1986-11-01), Schwartz et al.
patent: 6183026 (2001-02-01), Cai et al.
patent: 6244641 (2001-06-01), Szapucki et al.
patent: 6942265 (2005-09-01), Boyd et al.
patent: 7104578 (2006-09-01), Hartog
patent: 2004/0100110 (2004-05-01), Baumann et al.
patent: 2005/0110292 (2005-05-01), Baumann et al.

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