Ultra low contact area end effector

Details Ultra low contact area end effector Ultra low contact area end effector

2006-06-06

2006-06-06

Lillis, Eileen D. (Department: 3652)

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

Reexamination Certificate

active

07055875

ABSTRACT:
The present invention comprises a vacuum end effector having workpiece supports that work in conjunction with distorted workpiece surfaces. In one embodiment, each workpiece support has the ability to gimbal and conform the workpiece surface in contact with an outer edge of the support. Each workpiece support preferably provides a knife-like contact edge to minimize the contact area between the support and the workpiece while still providing an effective vacuum area to hold the wafer securely on the support. In another embodiment, each workpiece support is replaceable without having to remove the end effector from the robot assembly

REFERENCES:
patent: 3833230 (1974-09-01), Noll
patent: 5803979 (1998-09-01), Hine et al.
patent: 6077026 (2000-06-01), Sultz
patent: 6256555 (2001-07-01), Bacchi et al.
patent: 6298280 (2001-10-01), Bonora et al.
patent: 6435798 (2002-08-01), Satoh
patent: 2004/0195850 (2004-10-01), Ogimoto
patent: 2004/0226656 (2004-11-01), Walsh et al.
patent: 2005/0110292 (2005-05-01), Baumann et al.

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